The Effect of Corrugations on Mechanical Sensitivity of Diaphragm for MEMS Capacitive Microphone

In this paper the effect of corrugations on mechanical sensitivity of diaphragm for MEMS capacitive microphone is investigated. Analytical analyses have been carried out to derive mathematic expression for mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that the mechanical sensitivity and displacement of diaphragm can be modeled using thin plate theory. The mechanical stress of corrugated diaphragm is calculated using mathematical model and its relationship with residual stress is expressed. The analytical results show that the mechanical sensitivity of diaphragm can be increased using corrugations, because of reducing the effect of residual stress in corrugated diaphragm