Effect of Thermoelastic Damping on Axisymmetric Vibration of Rotating Circular Micro Plate

Thermoelastic damping is recognized as a significant loss mechanism at room temperature in micro and nano-scale resonators. In this paper, the governing equations of coupled thermoelastic problems are established for axisymmetric out of plane vibration of rotating circular plate with constant angular velocity about its central axis. Then the Quality Factor obtained by finite element analysis using ANSYS software, as a function of rotation, environmental temperature and plate dimensions. The results for non rotating plate are verified based on the results obtained by the previous works. Then the effects of rotation, environmental temperature and plate dimensions on the thermoelastic damping are studied. The results show that, thermoelastic damping would be rise to a maximum value at specific sizes of plate, which is dependent on temperature and angular velocity.