Survey on Microstructural Change of Hard Nanostructured with Change of the Chemical Composition using Scanning and Transmission Electron Microscopy

The results of different studies showed that there is a strong relation between microstructure and mechanical, electrical and optical properties of coatings. For microstructural studies of nanostructured coatings we need electron microscopies that can work and detect in nano scale or even less. The purpose of using electron microscopy is finding the relationship between microstructure and different properties of coatings. In current paper working principles and sample preparation method for electron microscopy observation with focus on transmission electron microscopy as an effective way for microstructure analysis of nanostructured coatings is discussed. Finally, in order to give better understanding of using electron microscopies in microstructural analysis of nanostructured coatings, microstructural change of CrAlN and TiAlN/a-C coatings with chemical composition studied using electron microscopy instruments.