Growth of aligned Carbon Nanotubes by catalytic Chemical Vapor Deposition and vapor phase growth Methods

In this work, Vertically aligned carbon nanotubes ( VA-CNTs) were grown by chemical vapor deposition (CVD) method using Iron-Molybdenum catalyst supported by Silicon (Si) substrate. Acetylene gas (C2H2) as the carbon source, argon (Ar) as the carrier gas, hydrogen (H2) for reduction of the nanoparticles and iron-molybdenum nanoparticles as the catalyst for the growth of carbon nanotubes have been used at temperature of 750 °C. The reaction was performed inside a tube furnace equipped by a quartz tube and gases injected with the certain flow rate into the reaction tube. At first, substrate was coated by a thin layer of iron-molybdenum nanoparticles by the soakage method. Also, Vertically aligned carbon nanotubes wer grown using vapor phase growth method on silicon substrate. The samples characterization was performed using a scanning electron microscopy (SEM, LEO 906E), Field Emission Scanning Electron Microscopy (MIRA3 TESCAN) and X-ray energy dispersive spectroscopy analysis (EDX). Raman spectroscopy was also used to confirm the presence of single-walled nanotubes