Optimization of Copper Mirrors Polishing Parameters by Chemical-Mechanical Method

Copper mirrors are most applicable in laser industries especially in highest laser powers. One of the processes for manufacturing these mirrors is Chemical-mechanical polishing process. Quality of mirror surface is depended on many factors in this process. The main objective of this study is to model and optimize important parameters in cupper mirrors polishing process. Optimization of polishing parameters was performed using experimental data and statistical methods. A Taguchi approach is employed in order to gather experimental data. Based on analysis of variance (ANOVA) and signal-to-noise (S/N) ratio, the best sets of polishing parameters specifications have been determined. The results of the optimization indicate an improvement of %10 compared to the best experimental results of the design experiments.