Magnetoelectric sensor based on coupling of patterned galfenol alloy thin film and aluminum nitride

Magnetic field sensors based on magneto-electric structures have various applications in industries such as biosensors. Through simulation using the finite element method (FEM), sensors with appropriate main frequency and sensitivity can be designed, paving the way for the fabrication of bio-magnetic sensors. In this article, we utilized magneto-electric structures based on patterned Galfenol alloy nanostructures as the magnetostrictive layer and aluminum nitride as the piezoelectric layer. The designed cantilever-type structure has a magnetoelectric coefficient of 5850 V/cm.Oe at the resonance frequency of 3051.9 Hz and is capable of measuring magnetic fields in the range of one Pico tesla.