Simulation of Substrate Temperature Effect by Structure Zone Model for Ni Nanostructures Growth by Kinetic Monte-Carlo Method

In this paper, nucleation stage and bulk growth of Ni nanostructures deposited under oblique angle of 75˚-85˚ by using kinetic Monte-Carlo method are simulated. Substrate temperature effect on shape, size, and columns distribution are studied as well. At bulk growth stage, by definition local potential barrier and random thermal energy, Ni nanostructures growth at three zone temperatures which is in the range of T/Tm<0.45, (T is substrate temperature and Tm is material melting temperature) are studied. Our results showed that at range of T/Tm<0.3 structures are grown as thin column and dome shape on the top. With increasing temperature, in the range of 0.3