A Novel Method to Construct a Double-side-electrode Electroosmotic Mixer for Biotechnological Applications

We report a simple, low-cost and novel method for constructing double-side microelectrodes in microfluidic electroosmotic mixer. Double-side electrodes have unique properties in some applications such as study of biological cells, electrokinetics, dielectrophoresis and so on. The fabrication process involves photolithography, sputtering techniques to fabricate the electrodes, precise alignment and plasma bonding. Compared to other fabrication methods for double-side electrodes, the presented one does not require rigorous experimental conditions, cumbersome processes and expensive equipment. Numerical analysis on electric field distribution for single-side and double side electrode configurations is presented to verify the unique field distribution of double-side electrodes. Fabricated device with experimental results are illustrated. Eventually, the effect of misalignment due to a layer of SU-8 is depicted. The proposed technique offers alternatives to construct double-side electrodes from single-side electrodes. The simplicity of the fabrication process provides easy ways to fabricate electrodes fast in double-side of microchannel for mixing purposes.