Study of the Nonlinear Effects of Squeeze Film Damping RF MEMS Ring Resonators

This paper presents an analytical study of the nonlinear effect of squeeze film damping on the previously designed ring shape anchored contour mode RF MEMS disk resonators. Varations of damping coefficient and stiffness constant of the resonator due to squeeze film phenomenon are evaluated and their efects on quality factor of the resonator is calculated. Analytical calculations mention that due to ultra high spring constant of the resonator, resulting frequency pulling and damping related to this effect could be neglected. Based on these derivations, there is no requirement for high price
vacuum packaging for these resonators for increasing their quality factor. Extracting of the behavioral equations for the resonator in the presence of squeeze film effect is crucial in design of resonators in packaging, fabrication process and total cost points of view.