Design of Hot Cathode Ion Gauge Array and MEMS Type

Since 1950, Ultra-high vacuum measurement at the range of 10-12 torr has been done by means of hot-filament ionization gauges known as Bayard–Alpert gauge. The research work on the MEMS type of this gauge has not been successful and has not yet been commercialized. This paper introduces a variety of MEMS and non-MEMS vacuum sensors that can measure HV and UHV. This article introduces one idea, design and simulation of MEMS type ionization gauge as an array. The dimensions of proposed gauge occupies are 12mm×5mm×1mm which is at least 3000 times smaller than the traditional one. Total power consumption of the proposed gauge array is 50 times lower than the traditional type. The structure of the proposed gauge consists of collector, cathode and grid differs from the conventional one and is based on MEMS technology. The cathode in this design made of nickel and can electron emission at 750℃. The temperature along the cathode is identical and independent of vacuum pressure. Sensitivity coefficient of the proposal is 0.6 at the measuring range of 10-3 to 2×10-7 torr. The sensitivity coefficient of the designed architecture is 20 times less than the conventional one, which shows the disadvantage of this design.