Modeling and Simulation of a Piezoelectric Micro Flow Sensor with Micro Energy Harvester

Microelectromechanical systems as a promising and efficient technologies of present age can bring about a great revolution in the industrial and commercial products. The increasing development of technology requires the use of wireless sensors (without power supply); so the study and modeling of micro energy harvesters is an important issue. In this paper, a micro flow sensor consists of a symmetric multilayer piezoelectric with a micro energy harvester have been modeled and simulated. In order to model this sensor, coupled equations between solid mechanics, fluid mechanics and piezoelectric have been solved with finite volume and finite element method. To ensure the solution, a fully fluid-structure interaction simulation of micro flow sensor in COMSOL Multiphysics have been presented. With the flow rate of 60 micro liter per minute, the transverse displacement of the free end of the beam is 9.5 Nano meters and the generated voltage is 2.30 millivolt.