Design and Simulation of Crystalline Photonic Square Ring Resonator-based Nano Sensors for Pressure Measurement

In this paper, a nano-sensor based on a crystalline photonic square ring resonator is designed and simulated based on the variation of silicon refractive index and resonance wavelength. This nanosensor is recommended for measuring pressure in the range of 0 GPa to 8 GPa. In order to detect the wavelength range of the pressure sensor, in the calculation of the photonic band gap, the flat-wave expansion method is used, as well as in the time domain finite difference method to obtain the operating parameters of the sensor. The sensitivity and quality factor of the designed nano pressure sensor are 8 nm / GPa and 995.55, respectively. Due to its compact size, the sensor structure is suitable for use in the nanoelectric industry of optical mechanics and nanotechnologies.