In this work, diamond-like carbon (DLC) films were deposited on silicon substrate by an ion beam method (IBM ) using propane (C3H8) and argon (Ar) gases. Then, thermal annealing effects (from 200ºC to 500ºC) on the chemical and optical properties of the diamond-like carbon thin films were investigated. Structures, morphology, chemical and optical properties of the films were investigated by Raman spectroscopy, field emission scanning electron microscopy (FESEM ) and fourier transform infrared (FTIR) spectrometry methods. The Raman results proved that increasing of the annealing temperature (Ta) cause to the conversion of chain links to aromatic rings. Based on the FESEM results, the micro-cracks were formed in the film at 200 ºC. Altogether the results showed that decomposition of the DLC films begins at the annealing temperature above 300 °C. As Ta was further increased to 500 °C, the main part of the film was oxidized. Also FTIR analysis indicated that by increasing Ta, the transmission of the DLC film was decreased in the wavelength range of 3-5 μm.
- حق عضویت دریافتی صرف حمایت از نشریات عضو و نگهداری، تکمیل و توسعه مگیران میشود.
- پرداخت حق اشتراک و دانلود مقالات اجازه بازنشر آن در سایر رسانههای چاپی و دیجیتال را به کاربر نمیدهد.