Investigation on effect of different parameter on deposition kinetic of SiC coating applied by chemical vapor deposition (CVD) method on carbon-carbon composite

In current investigation, after SiC coating being applied on carbon-carbon composite by chemical vapor deposition method (CVD), the effect of different parameters on deposition kinetic has been studied. In order to investigate the phases of SiC coating, XRD analysis has been used. Moreover, SEM analysis has been carried out to study the morphology of Carbon-Carbon composite before and after SiC coating being applied. Furthermore, in order to study process exhaust, EDS analysis has been performed. In this regard, the effect of following parameters on deposition rate has been studied: temperature, entrance gas composition, time, and position of sample in reactor. The result of the research shows that, regarding to deposition mechanism; changes of deposition parameter affect the deposition rate. In addition, SEM images demonstrate that the crystal size of SiC and coating thickness in optimum condition of deposition are almost 300 nm and 3 μm consecutively. Finally, through the SEM images, the surface of Carbon-Carbon composite before and after SiC coating has been compared.