Fabrication and Evaluation of Nanobiomechanical Ozone Sensor using Zinc Oxide Nanorods: Effect of Temperature on Sensor Performance and Improved Selectivity to Other Gases

Nowadays, ozone therapy has been proposed as a non-invasive and efficient method to treat many diseases. Excess amounts of this gas are harmful to the lungs and eyes and can have adverse effects on the treatment process. Therefore, it is important to monitor the amount of ozone gas used. In this article, in order to accurately measure and control the amount of this gas, the design and construction of the nanobiomechanical ozone gas sensor has been discussed. In this sensor, zinc oxide active material is used on a glass substrate and aluminum shoulder electrodes. The results of the characterization and measurement of this sensor show that this sensor has the best performance at a temperature of 120 degrees Celsius in the amount of 5 ppm of ozone gas with an efficiency of 84%. Also, the response and recovery time of this sensor has been measured as 15 and 120 seconds, respectively. The remarkable thing about the built sensor is the ability to measure ozone gas up to the minimum value of 1 ppm. Also, it has good selectivity to oxygen and acetone gases in equal amounts, so the response of the sensor to 5 ppm of oxygen and acetone gas is 21% and 31%, respectively. Also, the results showed that the proper design of the sensor packaging, looking at its mechanical aspects, does not make significant changes to the sensor performance.