Extracting Dynamic Model of a MEMS Vibratory Gyroscope with Continues Structure and Its Solution for Harmonic Force

Almost all the MEMS gyroscopes are vibratory, and work based on Coriolis force. Analysis of MEMS Vibratory Gyroscopes with ring resonator is proposed in this paper. Different gyro resonators are developed in literature such as circle and 8 edge star. Analyzing these structures with ABAQUS, we introduce a novel 16 edge star resonator. Analytical and simulated frequency answers are compared. Through this ring equation instead of ring model with support and connections is validated. Also response of the system to harmonic input force with constant amplitude is determined.