A comparative study of depth profiling of oxygen in nanoporous anodic alumina by nuclear reaction analysis and 16O(α,α)16O resonant elastic scattering

Depth profiling of Oxygen in the surface of materials is important for many oxide elements. In this research two methods of ion beam analysis techniques were used for depth profiling of oxygen in nanoporous anodic Alumina by Nuclear Reaction Analysis (NRA) ( 16O(d, p1)17O ,16O(d, p0)17O) and resonant elastic scattering (RES)( 16O(α, α)16O). By using simulation software, variation of oxygen concentration was revealed in depth. The results show that the RES method has a good resolution but could not penetrate more than few micrometers and NRA method (d, p) analyzes oxygen in the deeper depth of sample but by lees resolution. Sharp resonance cross section outcomes more resolution in depth profiling of Oxygen in the RES method.