Introduction of Secondary, In Beam Secondary and Cathodoluminescence detectors in the Scanning Electron Microscope

The basis of scanning electron microscope, as its name implies, is based on scanning the sample surface by an electron beam. The area of the sample which the primary electron beam interact, is named as interaction volume. Because of the variety and multiplicity of the electron impacts, there are many complications to investigate how the size of interaction volume will change. In order to investigate the properties and specifications of the material by means of imaging, elemental analysis and chemical compositions, the possibility of detecting emitted beams of material caused by its interaction with primary electrons is at a high level of importance. Together with the development and progress of electron microscopes, different varieties of detectors are designed in order to identify the properties of the material. In this article three types of most important detectors of scanning electron microscopes, will be investigated. Secondary electron detector, in beam secondary detector and Cathodoluminescence detector will be studied in this article.