Investigation and Comparison of Detectors of Energy Dispersive(ED) and Wavelength Dispersive (WD) Systems in Scanning Electron Microscope

Obtained information is from X-rays by energy or wavelength of them, according to that two type of X-ray detection system will be: EDS system as the energy dispersive spectrometer and the WDS system as the wavelength dispersive spectrometer.EDS systems often use different types of semiconductor detectors, such as Si (Li), HPGe and SDD, on the other hand detectors used in WDX usually are gas detectors such as proportional counters or scintillation detectors. Although the performance of the detectors and X-ray detection is quite different, but the ultimate goal in both types of spectroscopy is detection energy or wavelength of characteristic X-ray emitted and elemental analysis in the desire sample in scanning electron microscopy.