Investigation of quality factor for linear vibrations of rectangular microplates with thermoelastic damping

Regarding the necessity of obtaining high-quality resonators in micro electromechanical systems (MEMS), recognizing and investigating the parameters that effect on the quality factor are essential and inevitable. In micro electromechanical systems, microplates are used as resonators and RF filters and so on. In this paper, the effect of thermoelastic damping, which is one of the most important factors affecting the quality factor, has been investigated for rectangular microplates. Galerkin method has been used to simplify and solve the governing equations. The result is a nonlinear algebraic expression for the quality factors of microplates of general conditions due to thermoelastic damping. Unlike previous researches, the proposed model can directly calculate the quality factor. COMSOL Multiphysics software is used for finite element simulation. After verification of the proposed model, the effect of various parameters is investigated. The proposed model can also be used to calculate the pull-in instability voltage. The results of current paper can be used to design micro electro mechanical systems (MEMS) and another applications can be defined for that.