Investigation of the effect of different parameters on force in the second phase of two-dimensional nanomanipulation

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Article Type:
Research/Original Article (دارای رتبه معتبر)
Abstract:
Manipulation and movement of micro / nanoparticles has become very important today in the manufacture and production of microscale equipment. The nanomanipulation process is performed in two phases using an atomic force microscope. The first phase involves the target particle before it begins to move, and its purpose is to extract the force and critical time for the micro / nanoparticles to start moving. In the second phase, the motion of the particles from the origin to the destination is examined. Modeling, simulation and investigation of parameters affecting this phase are of great importance. In this paper, the effects of eight parameters including particle radius, probe radius, probe height, cantilever length, cantilever width, particle length, Poisson's ratio and modulus of elasticity on force in the second phase of manipulation are investigated. For this purpose, in this paper, e-Fast statistical sensitivity analysis method has been used. The results show that the probe height with 48%, cantilever width with 19%, modulus of elasticity with 14% and cantilever length with 8%, will have the greatest effect on force changes in the second phase of manipulation. The resulting effects of changes in particle radius, probe radius, probe Poisson's ratio, and the length of the target micro / nanoparticle cylinders can be ignored.
Language:
Persian
Published:
Iranian Journal of Manufacturing Engineering, Volume:8 Issue: 2, 2021
Pages:
23 to 31
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