Global sensitivity analysis of nanomachining parameters by using dynamic scanning thermal microscope

In this study, global sensitivity analysis of nanomachining parameters by using a dynamic scanning thermal microscope is investigated. Thus, the cross-section of a nanomachined sample by sweeping with different tip radius on the vibrational response of the system at different speeds and temperatures are simulated. It is shown that by increasing temperature, the depth of nanomachining decreases, and by increasing tip radius, the depth of nanomachining increases. Also, it is declared that the final quality of the nanomachining decreases by increasing speed traveling. Then, the Sobol indices for the mean depth and surface finish of the nanomachined sample are studied. It is shown that traveling speed is not affected the mean depth of nanomachining in its physical range and so the effects of the probe traveling speed and interaction between parameters are negligible. It is declared that the effect of interaction between temperature, traveling speed and tip radius is important on the final surface finish of the sample, however, the most important parameter is still the temperature difference. Then, the total indices and Sobol indices are compared. It is stated that the total indices are significantly higher than the Sobol indices for the final surface of ​​the nanomachining. For the mean depth of the nanomachining the total indices and Sobol indices for temperature and tip radius are approximately equal and the effect of probe traveling speed is negligible.