Evaluation of diaphragm pressure sensor sensitivity based on MEMS technology using finite element analysis

Diaphragm pressure sensors are used in various industries. Much research has been done to optimize and improve the quality of these sensors. This paper investigates "sensitivity" as a critical variable in diaphragm pressure sensors based on MEMS technology. Aperture geometry is one of the most influential variables in the sensitivity of a diaphragm sphygmomanometer, which in addition to sensitivity, can affect other variables such as operating range, sensor accuracy, dimensions, and even price. To increase the performance and sensitivity of pressure sensors, the sensor aperture was simulated in AbaqusFEA software, and while validating the computational solver, different geometries were evaluated. The results showed that the circular diaphragm has the best performance. Then the effect of corrugations on the surface of the diaphragm was investigated, and different forms of waves were simulated. The results showed that creating a circular wave with a radius of 15 μm at the end of the diaphragm surface increases the sensor's sensitivity by 18%.