Elemental Analysis and Investigation of Distribution of Elements in Different Samples by Scanning Proton Microscope

Finding the distribution of elements in a given sample is very important in biology, microelectronics and geology. By using a microbeam and scanning the samples, we can obtain a great deal of information about the distribution of elements. After the installation of a microprobe system in the Van de Graff Laboratory, we started applying this system. In this paper, we report some preliminary results on the distribution of elements in archaeological, geological, microelectronic samples. The aim of this paper is to describe the capabilities of the microprobe system in material analysis.