Fabrication of Electrostatic Microactuator with SU-8 polymer for continuous diaphragm-based devices

Message:
Keywords:

Microelectromechanical system , Electrostatic Actuators , Microactuators , Su , 8.

Language:
Persian
Published:
Electronics Industries, Volume:6 Issue: 3, 2015
Page:
81
https://www.magiran.com/p1454106