Study on effects of variation of different design parameters in simulation of multifunctional Nano piezoelectric resistive-capacitive accelerometer sensor

In this paper, design and mathematical simulation of a multifunctional piezoelectric capacitive-resistive Nano accelerometer sensor has been investigated using Comsol multiphisics finite element software. The governing equation of motion in thetransverse direction for a cantilever Euler-Bernoulli beam is derived considering electrostatic and van der Waals-Casimir forces. The effect of existence of piezoelectric layer, piezoresistive and capacitive patches in the bending behavior of the sensor is considered applying the physical properties of piezopatches and then simulated and solved using mathematical modules of the Comsol software. For four simulated modes of Nano sensors the obtained results are included to the values of ∆R/R,∆V/V and ∆C/C for piezo patches with respect to the variation of applied acceleration of the sensor, stress distribution along the length of the beam and maximum value of von Mises stress to compare with the yield stress of the sensor, deflection of the beam with respect to the variation of applied acceleration of the sensor, fatigue analysis for the sensor and the sensor’s mode shapes and natural frequencies to determine the performance of the sensor.